Types of processes suitable for various vacuum pumps

1. Water ring vacuum pump. Suitable for processes such as vacuum concentration, vacuum dehydration, vacuum decolorization, vacuum drying, vacuum preservation, vacuum storage, vacuum conveying, and vacuum molding.
2. Reciprocating Vacuum Pump.  Suitable for processes such as vacuum distillation, vacuum concentration, vacuum impregnation, vacuum filtration, vacuum molding, vacuum drying, and vacuum treatment of molten steel. The processes for which reciprocating vacuum pumps and water ring vacuum pumps are used are basically the same. However, reciprocating vacuum pumps cannot directly pump water vapor; when pumping water vapor, a cold trap must be installed and cooled using a refrigeration compressor system.
3. Oil-sealed mechanical vacuum pumps (including sliding vane pumps, rotary vane pumps, and fixed vane pumps).  These are suitable for use in processes such as vacuum distillation, vacuum drying, vacuum impregnation, vacuum sintering, vacuum insulation, vacuum brazing, vacuum coating, and vacuum heat treatment. Currently, rotary vane oil-sealed mechanical vacuum pumps (such as Busch vacuum pumps) are widely used as fore-vacuum pumps for direct exhaust to the atmosphere.
4. Roots Vacuum Pump (Mechanical Booster Pump).  Suitable for use in processes such as vacuum sintering, vacuum brazing, vacuum impregnation, vacuum drying, vacuum coating, vacuum conveying, and vacuum smelting. Most Roots pumps cannot exhaust directly to the atmosphere and require a rotary vane pump or sliding vane pump as a backing pump. Wet Roots pumps can exhaust directly to the atmosphere and are mainly used in the paper industry.
5. Oil Booster Pump. Suitable for use in processes such as vacuum smelting, vacuum sintering, vacuum brazing, and vacuum heat treatment.  Similar to mechanical booster pumps, it cannot discharge directly into the atmosphere and must use a rotary vane pump or sliding vane pump as a forepump.
6. Oil Diffusion Pump. Suitable for use in processes such as vacuum coating, vacuum heat treatment, vacuum smelting, vacuum purification, electronic vacuum devices, vacuum analytical instruments, vacuum leak detectors, space vacuum simulation devices, and accelerator vacuum systems. It is suitable for achieving high vacuum but cannot exhaust directly to the atmosphere; it must be used with a foreline vacuum pump.
7. Dry pumps (including screw pumps, scroll pumps, and claw pumps).  These are suitable for oil-free, clean vacuum processes, such as those used in the semiconductor, electronics, and chemical industries. These types of pumps can discharge directly to the atmosphere.
8. Adsorption pump. Suitable for use in various vacuum electronic devices, integrated circuits, analytical instruments, surface instruments, and various vacuum systems requiring a clean, oil-free environment.
9. Titanium pumps (including sputter ion pumps and sublimation pumps).  Suitable for use in vacuum coating, large-scale integrated circuits, surface physics and surface chemistry, thermonuclear physics, plasma physics, and superconductivity technology.
10. Molecular pump. Suitable for use in vacuum coating, integrated circuits, surface physics, surface chemistry, plasma physics, optical instruments, thermonuclear reactions, and aerospace technology.
11. Water jet pump. Suitable for use in vacuum material handling, vacuum conveying, and various process fields such as light industry, chemical industry, chemical fiber, pharmaceuticals, coatings, oils and fats, papermaking, caustic soda production, sugar refining, food processing, brick manufacturing, and vacuum deoxygenation.
12. Steam jet pump. Suitable for use in processes such as vacuum smelting, vacuum degassing, vacuum evaporation, vacuum drying, and vacuum humidification.
13. Cryogenic pump. Suitable for use in applications such as vacuum coating, surface physics, superconductivity technology, and aerospace technology.

Jan 09,2026